Grinding induced subsurface cracks in silicon wafers
The process of turning single crystal silicon ingot into wafers is referred to wafering As shown in Fig 1 a typical wafering process flow consists of 1 slicing to slice single crystal silicon ingot into wafers of thin disk shape 2 edge profiling or chamfering to chamfer the peripheral edge portion of the wafer 3 flattening lapping or grinding to flatten the surface of the
